Mask alignment exposure device for sample interior, BA series
Pattern exposure at matching positions on the front and back of samples with different processes.
The BA series backside mask alignment exposure device is a low-cost mask alignment system that enables alignment from the backside of the sample, which was difficult with conventional exposure devices. It can also be used as a standard single-sided exposure mask aligner, supporting the development of various MEMS and semiconductor devices with double-sided configurations. This device allows for the alignment and exposure of mask patterns to specified positions on the opposite side (the second side) of the sample, relative to pre-formed alignment marks on the first side. For more details, please contact us or refer to the catalog.
- Company：ナノテック
- Price：Other
